JPH0386558U - - Google Patents
Info
- Publication number
- JPH0386558U JPH0386558U JP14851589U JP14851589U JPH0386558U JP H0386558 U JPH0386558 U JP H0386558U JP 14851589 U JP14851589 U JP 14851589U JP 14851589 U JP14851589 U JP 14851589U JP H0386558 U JPH0386558 U JP H0386558U
- Authority
- JP
- Japan
- Prior art keywords
- heating body
- sample chamber
- joined
- ion implanter
- source vaporizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851589U JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851589U JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0386558U true JPH0386558U (en]) | 1991-09-02 |
| JPH0622914Y2 JPH0622914Y2 (ja) | 1994-06-15 |
Family
ID=31694960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14851589U Expired - Lifetime JPH0622914Y2 (ja) | 1989-12-22 | 1989-12-22 | イオン注入機のソース部ベーパライザ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622914Y2 (en]) |
-
1989
- 1989-12-22 JP JP14851589U patent/JPH0622914Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0622914Y2 (ja) | 1994-06-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |